Indars Flatness Interferometer
For noncontact flatness measurements, the Indars Flatness Measurement Interferometer is an ideal instrument for thin, transparent wafers, windows and substrates.
The schematic is the top view of the flatness interferometer apparatus with vertical positioning of a thin transparent wafer (1) and precision optical flat (2). The parabolic metallic reflector (3) creates a beam of monochromatic light from a sodium light source (4). The beam has a uniform distribution of light intensity in the plane of matte glass (5), providing the dispersion of wave vectors of waves within a wide solid angle. The interferometer pattern can be observed visually (7) or taken by camera. The inclined background screen (6), having a diffusive surface, is placed between the light source and the thin transparent wafer.
Flatness Measurement Interferometer Schematic
Flatness Measurement Interferometer
For additional information on the Patent Pending Indars Flatness Interferometer see:
Valley Design invites you to attend the upcoming Photonics West exhibition and conference, January 23 - 25, 2007 being held at the San Jose Convention Center in San Jose, California. Photonics West is North America's largest commercial exhibition on optics, lasers, biomedical optics, optoelectronic components and imaging. Combined with a comprehensive technical program, Photonics West brings together more than 1,000 exhibitors from the global optics and photonics community to showcase a wide range of products and services.
Valley Design will be exhibiting at Booth #1947, and will be demonstrating the new patent pending Indars Interferometer. This new low-cost optical interferometer is specially designed to measure thin, transparent wafers and substrates, as well as vacuum chuck flatness measurements. For more information on Photonics West 2007, please click here.
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for further details.
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Last updated: 6 December 2006 |
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