GE 124 Fused Quartz 100 mm Wafers to SEMI Specifications

When naturally occurring Crystalline Silica (Silicon Dioxide-SiO₂) in the form of stone, sand or rock is melted, the resulting material is called Fused Quartz. The clear variety is known as clear Fused Quartz.

This is not to be confused with Fused Silica which is manufactured from synthetically derived Silicon Dioxide and is technically referred to as synthetic Fused Silica. However, in many applications, Fused Quartz and Fused Silica can be used interchangeably. The main differences are that Fused Quartz has much lower OH content (<100ppm) and Fused Silica transmits somewhat better in the UV.

Fused Quartz is a high purity material, and has high chemical resistance, good thermal shock resistance, strong compression characteristics, and low thermal expansion coefficient. Fused Quartz wafers, windows and substrates can be used for mirrors, viewing windows, optical flats, insulators and other optical, electronic and semiconductor applications.

Physical Properties

Density: 2.21 g/cm³
Moh's Hardness: 7
Knoop Hardness: >600 kg/mm²

Mechanical Properties

Compressive Strength: 650 - 1100 MPa@R.T.
Tensile Strength: 48 MPa@R.T.
Young's Modulus: 70 GPa
Flexural Strength (MOR): 80 MPa@R.T.
Poisson's Ratio: 0.17

Optical Properties

Transmission Curve

Thermal Properties

Max. Use Temperature: 1200°C
Thermal Shock Resistance: >1400
Thermal Conductivity: 1.4 W/mK
Coefficient of Linear Thermal Expansion (CTE): 0.45
Specific Heat: 0.16 cal/g-°C@R.T.

Electrical Properties

Dielectric Constant: 3.75 at 20°C, 1MHz
Dielectric Loss: < 0.0004 at 20°C, 1MHz
Specific Resistivity: 10¹⁸ ohm/cm³ at 20°C
Dissipation Factor: < 0.0001 at 20°C, 1MHz

Delivery: From stock

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Updated: 10 January 2011

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