Polished Glass Wafers and Substrates to SEMI Standards
Glass wafers and glass substrates including Fused Silica, Fused Quartz, Soda Lime Glass, BK7, 1737F, AF45, B270, D263, LASFN9, Borosilicate glass, and other materials such as 99.6% and 96% Alumina, Sapphire and Aluminum Nitride, are available to SEMI specifications in sizes ranging from 50mm (2") up to 450mm (17.7"). These SEMI standard wafers can also be fabricated with a SEMI notch or one or two SEMI flats.
The surfaces of these glass substrates and glass wafers can be lapped opaque or if fabricated from sheet glass, are standard transparent on one or both sides with chamfered edges. Wafers may also be optically polished. Along with SEMI standard sizes, Valley also fabricates custom wafers in any size and thickness with tight tolerances (+/- .5um) including "ultra-thin" - 0.001" (25 microns) thick.
Edges can be optically polished or rounded. Wafer cassette packaging available.
Typical Glass Substrate and Glass Wafer Applications:
- Thin film glass substrates
- Cover glass
- Optical window windows
- Monitor wafers
- Dummy wafers
- Mirror coating substrates
- Optical coating substrates
- Touch control panels
- Solar cells
- Electroluminescent displays
- MEMS and SOI
Round Glass Wafers and Glass Substrates
With and Without SEMI flats or notch
Available in the following Materials:
Fused Silica, Soda Lime Glass, BK7, 1737F, AF45, B270,
D263, LASFN9, 99.6% Alumina, 96% Alumina,
Sapphire, Quartz, Aluminum Nitride, and Borosilicate Glass. Other materials available on request.
STANDARD SIZES AVAILABLEStandard surface finish of sheet glass material is 60/40 scratch/dig, and is transparent. Any glass can be further polished for higher quality surface finish, and flatness, or can be lapped opaque.
|SEMI Std. Geometry||Conversion (mm / inches)||Thickness||Primary Flat Length||Secondary Flat Length|
|2" ± .015" dia.||
50.8mm ± .38mm dia.
|.011" ± .001" (279um ± 25um)||.625" ± .065"||.315" ± .065"|
|3" ± .025" dia.||76.2mm ± .63mm dia.||.015" ± .001" (381um ± 25um||.875" ± .125"||.44" ± .06"|
|100mm ± .5mm dia.||3.937" ± .019"||525um or 625um ± 20um||32.5mm ± 2.5mm||18mm ± 2mm|
|125mm ± .5mm dia.||4.921" ± .019"||625um ± 20um||42.5mm ± 2.5mm||27.5mm ± 2.5mm|
|150mm ± .2mm dia.||5.905" ± .007"||625um or 675um ± 20um||57.5mm ± 2.5mm||37.5mm ± 2.5mm|
|200mm ± .2mm dia.||7.87" ± .007"||725um ± 20um||Notch||-|
|300mm ± .2mm dia.||11.81" ± .007"||750um ± 20um||Notch||-|
NOTE: All sizes are available with tighter tolerances, better surface finishes and flatness, and in any custom geometry or thickness. Contact us for any standard or custom requirements.
Click Here for Properties of Optical Glasses.
Other informative Web pages:
- www.ultra-thin.com/mems MEMS and bonded SOI ultra-thin Silicon wafers
- www.quartz-silica.net Polished Fused Silica substrates and wafers
- www.edgepolishing.com Edge and angle polishing
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